Header

Shop : Details

Shop
Details
44,85 €
ISBN 978-3-8191-0428-2
292 pages
112 figures
English
Thesis
December 2025
eBook (PDF)
Matthias Moser
AlGaN/GaN-Based Pressure Sensors for Application in Harsh Environments
The ability to sense and respond reliably in extreme environments is crucial for advancing technologies in space, aeronautics, automotive, and energy applications. Conventional silicon-based sensors face intrinsic material limitations under such conditions, where high temperatures, radiation, and mechanical stress degrade their performance. Gallium nitride (GaN), with its wide bandgap, high thermal stability, and mechanical robustness, offers a promising alternative for sensor technologies operating beyond the limits of silicon. This work investigates the design, fabrication, and characterization of GaN-based pressure sensors developed for stable and precise measurements in harsh environments. A Wheatstone-bridge configuration integrating High Electron Mobility Transistors (HEMTs) enables high sensitivity, excellent linearity, and low power consumption. The fabrication process combines front-end and back-end integration steps within an Au-free technology platform and includes backside micromachining for circular and bossed membrane structures. Experimental evaluation under controlled temperature and pressure conditions demonstrates reliable operation and strong agreement with simulation results. The study further explores the potential of gated HEMT devices to enhance sensitivity through electrical tuning, enabling flexible operation across different measurement ranges.
The results highlight the suitability of GaN for highly resilient, low-power, and integrable sensor systems, offering a robust foundation for future research on signal conditioning and temperature compensation. Overall, this work contributes to the advancement of GaN pressure sensing technologies capable of sustained performance in extreme and mission-critical environments.
Keywords: AlGaN; GaN; MEMS; Pressure Sensor; Piezoelectric Effect; Harsh Environment; Membrane
Other formats
Print version: 978-3-8191-0367-4
You need Adobe Reader, to view these files. Here you will find a little help and information for downloading the PDF files.
Please note that the online documents cannot be printed or edited.
Please also see further information at: Help and Information.
 
 DocumentDocument 
 TypePDF 
 Costs44,85 € 
 ActionDownloadPurchase in obligation and download the file 
     
 
 DocumentTable of contents 
 TypePDF 
 Costsfree 
 ActionDownloadDownload the file 
     
User settings for registered online customers (online documents)
You can change your address details here and access documents you have already ordered.
User
Not logged in
Share
Shaker Verlag GmbH
Am Langen Graben 15a
52353 Düren
Germany
  +49 2421 99011 9
Mon. - Thurs. 8:00 a.m. to 4:00 p.m.
Fri. 8:00 a.m. to 3:00 p.m.
Contact us. We will be happy to help you.
Captcha
Social Media