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Recommendation
978-3-8322-1234-6
48,80 €
ISBN 978-3-8322-1234-6
Softcover
156 pages
143 figures
234 g
21 x 14,8 cm
German
Thesis
March 2003
Metin Giousouf
Untersuchungen zu Siliziumresonatoren für die Uhrentechnik
Keywords: Mikrosystemtechnik; Monolithische Integration; Zeitmeßtechnik; Frequenznormal; MEMS; Silizium-Mikromechanik
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