Shop : Details
Shop
Details
45,80 €ISBN 978-3-8440-5450-7Softcover124 pages56 figures288 g24 x 17 cmEnglishThesis
August 2017
Zhiqiu Lu
Micromachined inductive suspensions with 3D wirebonded microcoils
Friction and wear have become more and more important with device scaling down. To eliminate friction and wear, this thesis presents a micromachined inductive suspension with 3D wirebonded microcoils. Experimental results show that the 3D suspensions have significantly improved performance compared to the reported 2D suspensions: better linear control, higher levitation height, less current consumption and lower device temperature. The thesis also demonstrates the potential of new applications of inductive suspensions integrated with electrostatic actuation. This comprehensive study gives important guidelines for the further integration of the suspension into other microsystems.
Keywords: micro-levitation; suspension; wirebonding; microcoil
Available online documents for this title
You need Adobe Reader, to view these files. Here you will find a little help and information for downloading the PDF files.
Please note that the online documents cannot be printed or edited.
Please also see further information at: Help and Information.
Please also see further information at: Help and Information.
| Document |  | Document | ||
| Type |  | |||
| Costs |  | 34,35 € | ||
| Action |  | Purchase in obligation and download the file | ||
| Document |  | Table of contents | ||
| Type | | |||
| Costs |  | free | ||
| Action |  | Download the file | ||
User settings for registered online customers (online documents)
You can change your address details here and access documents you have already ordered.
User
Not logged in
Export of bibliographic data
Shaker Verlag GmbH
Am Langen Graben 15a
52353 Düren
Germany
Am Langen Graben 15a
52353 Düren
Germany
Mon. - Thurs. 8:00 a.m. to 4:00 p.m.
Fri. 8:00 a.m. to 3:00 p.m.
Fri. 8:00 a.m. to 3:00 p.m.
Contact us. We will be happy to help you.
