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Catalogue : Details

Zhiqiu Lu

Micromachined inductive suspensions with 3D wirebonded microcoils

FrontBack
 
ISBN:978-3-8440-5450-7
Series:Microactuators – Design and Technology
Herausgeber: Prof. Dr. Ulrike Wallrabe
Freiburg
Volume:11
Keywords:micro-levitation; suspension; wirebonding; microcoil
Type of publication:Thesis
Language:English
Pages:124 pages
Figures:56 figures
Weight:288 g
Format:24 x 17 cm
Bindung:Paperback
Price:45,80 € / 57,30 SFr
Published:August 2017
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Abstract:Friction and wear have become more and more important with device scaling down. To eliminate friction and wear, this thesis presents a micromachined inductive suspension with 3D wirebonded microcoils. Experimental results show that the 3D suspensions have significantly improved performance compared to the reported 2D suspensions: better linear control, higher levitation height, less current consumption and lower device temperature. The thesis also demonstrates the potential of new applications of inductive suspensions integrated with electrostatic actuation. This comprehensive study gives important guidelines for the further integration of the suspension into other microsystems.