Microactuators – Design and TechnologyEditor |
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1. | Zhiqiu Lu Micromachined inductive suspensions with 3D wirebonded microcoils Volume: 11 Series: Microactuators – Design and Technology 978-3-8440-5450-7, August 2017 Online publication (PDF) >Friction and wear have become more and more important with device scaling down. To eliminate friction and wear, this thesis presents a micromachined inductive suspension with 3D wirebonded microcoils. ... more ... | 45,80 € |
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