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Catalogue : Details

Tjalf Pirk

The Twin Epipoly Process:

A Foundry Process Flow for a Microfluidic Application Kit in Silicon/Glass

FrontBack
 
ISBN:978-3-8322-7644-7
Series:Microfluidics & Nanofluidics
Herausgeber: Prof. Dr. Roland Zengerle
Freiburg
Volume:4
Keywords:Mikrosystemtechnik; Mikromechanik; Mikrofluidik; Prozessentwicklung; Mikropumps; Flusssensor; Mischer; MEMS; microfluidics; micropump; flow sensor; micromixer
Type of publication:Thesis
Language:English
Pages:168 pages
Figures:115 figures
Weight:248 g
Format:24 x 17 cm
Binding:Paperback
Price:48,80 € / 97,60 SFr
Published:October 2008
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